|
序号
No.
|
项目
Item
|
ITO靶材大型气氛烧结炉
Large-scale?ITO target materials atmosphere sintering kiln
|
|
2
|
有效堆料尺寸
Effective?Stockpile Dimensions(WxLxH)
|
800W×1600D×500H
|
|
3
|
最高使用温度
Maximum operation temperature
|
1650℃(正常使用温度1600℃)
1650℃(Normal operation temperature?1600℃)
?
|
|
4
|
控温区数量
Groups?of temperature control?zones
|
4温区
4 temperature control?zones
|
|
5
|
温度控制精度
Accuracy of temperature control
|
±1℃
|
|
6
|
温度均匀性
Temperature homogeneity
|
±5℃
|
|
7
|
升温速率
Heat-up rate
|
300℃/h
|
|
8
|
降温速率
Cooling rate
|
13h（1000℃～200℃）
|
|
10
|
窑炉气氛
Atmosphere inside kiln
|
空气、氧气
Air, oxygen
|
|
15
|
最大加热功率
Maximum sintering power
|
210kw
|
